BOSCH has been a supplier for MEMS automotive sensors for more than a decade. After starting in the early ‘90s with some ground-lying basic technology development (the BOSCH process for DRIE, release etch technology,and others),BOSCH introduced pressure sensors, air mass flow sensors accelerometers and gyroscopes into the automotive industry. These MEMS products have become enablers for several advanced automotive systems that help to make cars safe, clean and economical
Advanced fuel injection systems, passive and active safety systems, and others. This talk reviews the key role of MEMS technology products for the progress of automotive electronics and gives an outline for their use in a world of applications in the consumer electronics industry.
www.mstbw.de
